| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect the disconnection of a heater by an existing configuration without changing the design of a control board, and to reliably prevent the occurrence of a new problem in a disconnection state. Ž<P>SOLUTION: Heating apparatus has a container 22 which stores an object to be heated and includes: two or more heaters 35, 44 which are connected in parallel; and a temperature detecting means (a thermistor 54) for detecting the temperature of the object to be heated, and the heating apparatus heats the object to be heated by controlling the heaters 35, 44, based on the detection temperature of the temperature detecting means 54. In the heating apparatus, a disconnection determining process is performed, by presetting a determination value Th based on a temperature rise gradient in energizing the heaters 35, 44 in a non-disconnection state and a temperature rise gradient in energizing the heaters 35, 44 in a state where one of the heaters is disconnected, and determining the disconnection of one of the heaters 35, 44, based on whether a value exceeds the determination value within prescribed time during a heating operation with the heaters 35, 44. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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