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发明名称
MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5373967(A)
申请公布日期
1978.06.30
申请号
JP19760150184
申请日期
1976.12.14
申请人
FUJITSU LTD
发明人
YANO KENJI;ANDOU NOBORU
分类号
H01L21/60;H01L21/28;H01L23/12
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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