RESONANCE CHARACTERISTIC MEASUREMENT APPARATUS OF CANTILEVER STRUCTURE AND MEASUREMENT METHOD THEREOF

摘要

Disclosed herein are an apparatus and method for measuring resonance characteristics of a cantilever structure, which include outputting each different actuating signal corresponding to each single-frequency component in the frequency range of analysis, or outputting a spectrum actuating signal containing all the frequencies of the frequency range of analysis, or dividing the frequency range of analysis into a plurality of regions, selecting a frequency from the frequencies contained in the divided regions, and outputting an actuating signal corresponding to the selected frequency, inducing oscillation of the cantilever structure by the actuating signal, and converting the cantilever oscillation into an excitation signal to detect amplitude and phase of the excitation signal such that resonance characteristics of the cantilever structure related to the frequency range of analysis can be assayed.