| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a drawing inspection apparatus which performs the discharge performance inspection of the functional liquid drop discharging head accurately in a short time by using the alignment mask. Ž<P>SOLUTION: The drawing inspection apparatus 34, which inspects the discharge performance by discharging and impacting the functional liquid from the functional liquid drop discharging head 3, is provided with: the alignment mask 46 to which the impact mark to be the standard impact position of the functional liquid drop is marked; an inspection sheet S to which the functional liquid drop that is discharged for inspection is impacted; an image recognition means to recognize the location of the impact mark and the impact dot D of the inspection sheet S; and a head recognition means to recognize the location of the functional liquid drop discharging head 3 facing the inspection sheet. The alignment mask 46 is integrally provided with a mask body 46a to which the impact mark is marked and an extension part to be extended exceeding the inspection sheet from the mask body 46a, and further provided with a head calibration mark to calibrate the head recognition means at the location where positionally recognizes the functional liquid discharge head 3. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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