| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device and method for mark position recognition for highly accurately detecting a gravity position of a mark. Ž<P>SOLUTION: The device for mark position specifies a mark constituent of a prescribed area or more from an image of a periphery of the imaged mark, obtains a temporary gravity Gp from a figure circumscribed on the obtained mark constituent, extracts a contour region of the mark constituent by centering the temporary gravity Gp, distinguishing colors generating the difference of brightness in the inside and outside of a closed curve by forming the closed curve composed of the contour of the mark constituent positioned in the inside of the contour region and an inside boundary of the contour region with a contour shape specifying means, obtains aggregation of center points 42c by scanning a contour shape 34 of the closed curve toward a center direction of the temporary gravity Gp and successively calculating the center point of change points of a pair of brightness positioned on both sides of the scanning lines, and calculates the gravity G0 of the mark from the aggregation of the obtained center points. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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