发明名称 METHOD FOR DETERMINING AN OPTICAL PROPERTY OF AN OPTICAL LAYER
摘要 The invention relates to a method for determining an optical property of an optical layer, comprising detecting a transmission value or a transmission spectrum and a reflection value or a reflection spectrum of the optical layer, and determining the optical property based on the transmission value or the transmission spectrum, the reflection value or the reflection spectrum and a model of the optical layer.
申请公布号 US2009296100(A1) 申请公布日期 2009.12.03
申请号 US20080129143 申请日期 2008.05.29
申请人 APPLIED MATERIALS, INC. 发明人 SCHROEDER JUERGEN
分类号 G01B11/02 主分类号 G01B11/02
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