| 摘要 |
<p>Provided is a plasma generating body which can eliminate breakage due to thermal stress without deteriorating plasma generating efficiency. A plasma generating body (1) is provided with a base body (3) whereupon a discharge space (5) is arranged, and a pair of electrodes (9) arranged on the base body (3) by having the discharge space (5) in between. At least one electrode (7) of the pair of electrodes (9) has a plurality of electrode layers (15) arranged at positions different from each other in a direction where the pair of electrodes (9) face each other.</p> |
