APPARATUS INJECTING CHEMICAL LIQUID FOR LCD MANUFACTURE

摘要

PURPOSE: A fluid discharge apparatus for manufacturing an LCD(Liquid Crystal Display) automatically controlling discharged drug solution is provided to improve he utilization ratio of the drug solution by controlling the discharged drug solution based on signal from a flow meter. CONSTITUTION: A gas supply(162) supplies inactive gas to a gas supply pipeline. The liquid supplier stores the drug solution. The drug solution is discharged to the medicinal fluid discharge piping by using the inner pressure. A flow meter(165) generates signal by sensing the flow rate or the flux of the drug solution passing through the discharge tube. A controller(161) generates control signal based on the sensing signal. A gas flow controller(163) controls the inactivated gas amount in response to the control signal.