发明名称 |
Electrostatic capacitance type acceleration sensor |
摘要 |
First and second detection frames are supported by a substrate to be rotatable about first and second torsion axes. A first link beam is connected to the first detection frame on an axis located at a position moved from a position of the first torsion axis in a first direction crossing the first torsion axis and directed to one end side of the first detection frame. A second link beam is connected to the second detection frame on an axis located at a position shifted from a position of the second torsion axis in a second direction opposite to the first direction. An inertia mass body is displaceable in a thickness direction of the substrate by being linked with the first and second detection frames by the first and second link beams, respectively. This constitution makes it possible to obtain a highly precise acceleration sensor hardly influenced by disturbances.
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申请公布号 |
US7624638(B2) |
申请公布日期 |
2009.12.01 |
申请号 |
US20070933685 |
申请日期 |
2007.11.01 |
申请人 |
MITSUBISHI ELECTRIC CORPORATION |
发明人 |
KONNO NOBUAKI;HIRATA YOSHIAKI |
分类号 |
G01P15/125;G01P15/08 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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