| 摘要 |
PURPOSE: A capacitor and a method for manufacturing the same are provided to prevent the collapse and breakage of a storage node by forming a storage with the bottom thicker than the side. CONSTITUTION: In a capacitor and a method for manufacturing the same, a cylindrical storage node is formed on a substrate(11), and the thickness of the bottom is thicker than the sidewall. The cylindrical storage node comprises a first conductive film(18A) forming the sidewall and a second conductive film(19) forming the bottom. The first conductive film comprises silicon or metal, and the second conductive film comprises silicon. A sacrificing layer(15A) having an open part exposing a part of substrate to the outside is formed on the substrate. The second conductive film is formed through a selective epitaxial growth process.
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