| 发明名称 |
Methods for modifying features of a workpiece using a gas cluster ion beam |
| 摘要 |
Embodiments of methods of modifying surface features on a workpiece with a gas cluster ion beam are generally described herein. Other embodiments may be described and claimed.
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| 申请公布号 |
US7626183(B2) |
申请公布日期 |
2009.12.01 |
| 申请号 |
US20070850423 |
申请日期 |
2007.09.05 |
| 申请人 |
TEL EPION INC. |
发明人 |
WAGNER REINHARD;SKINNER WESLEY |
| 分类号 |
G21K5/04;G21K5/10 |
主分类号 |
G21K5/04 |
| 代理机构 |
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代理人 |
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