| 摘要 |
PROBLEM TO BE SOLVED: To provide a multilayer substrate capable of suppressing the occurrence of warpage and cracks without depending on a multilayer structure. SOLUTION: The multilayer substrate 1 includes an insulating sheet 2 obtained by baking a green sheet 6, and an insulating sheet 3 obtained by baking a green sheet 7 laminated on the green sheet 6 while having a relative dielectric constant different from that of the insulating sheet 2. The insulating sheet 2 is made up of a Zn-Nb-Ca-Ti oxide based ceramic material containing B<SB>2</SB>O<SB>3</SB>, the insulating sheet 3 is made up of a Zn-Nb-Ca-Ti oxide based ceramic material containing Mg<SB>2</SB>SiO<SB>4</SB>and B-Z-Si based glass, the difference of thermal expansion coefficients between the insulating sheet 2 and the insulating sheet 3 is≤0.5×10<SP>-6</SP>/°C, and the difference of percentages of contraction between the green sheet 6 and the green sheet 7 is within 1% when baking them. COPYRIGHT: (C)2010,JPO&INPIT |
