PLASMA GENERATING APPARATUS AND PLASMA PROCESSING APPARATUS

摘要

A flat-board-like high frequency antenna conductor (13) is arranged on a flange, which also serves as a part of a vacuum container and has a rectangular opening section, so as to cover the opening section by sandwiching an insulating glass frame body surrounding the opening section.  A high frequency power supply is connected to the high frequency antenna conductor at one end thereof along the long side, with a matching box therebetween, and the other end is grounded, then, power is supplied so that a high frequency current flows from the one end to the other end of the high frequency antenna conductor.  Thus, impedance of the high frequency antenna conductor is reduced and high density plasma at a low electron temperature can be efficiently generated.