| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a substrate for a polishing object holding material, which is restrained in warping and formed into a flat plate to the possible extent. <P>SOLUTION: In manufacturing the substrate, a resin material 5 made of a cycloolefin-based polymer resin is pinched between two press plates 3, 4 arranged in parallel with each other, and then pressurized, followed by heating the same to a predetermined heating temperature. Thereafter the resin material is cooled while being pressurized. At the time when the resin material is cooled to a predetermined cooling temperature or lower, the pressurization state of the resin material is released. <P>COPYRIGHT: (C)2010,JPO&INPIT |
