| 摘要 |
PROBLEM TO BE SOLVED: To enable a stable application of a pattern even for pattern formation of microscopic lines in the pattern formation by the application of a liquid formulation onto a substrate. SOLUTION: The method of forming a pattern which discharges ink while changing the gap between a held substrate and a nozzle includes a process of measuring the gap between the nozzle and the substrate by a distance sensor, a process (A) of narrowing the gap between the nozzle and the substrate, a process (B) of discharging ink in a small amount, a process (C) of providing a predetermined gap between the nozzle and the substrate, and a process (D) of relative-displacing the nozzle and the substrate in a horizontal direction, and at the same time, discharging ink. COPYRIGHT: (C)2010,JPO&INPIT
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