发明名称 SEMICONDUCTOR WAFER
摘要 The present invention is a semiconductor wafer including an orientation identification mark, which is used for identifying crystal orientation, on a peripheral surface thereof, in which the orientation identification mark is smoothly joined with a portion outside of the orientation identification mark on the peripheral surface, has a planar surface that is orthogonal to an inner diameter direction of the semiconductor wafer, and has a gloss different from that in the portion outside of the orientation identification mark on the peripheral surface.
申请公布号 US2009289378(A1) 申请公布日期 2009.11.26
申请号 US20090467438 申请日期 2009.05.18
申请人 SUMCO CORPORATION 发明人 HASHII TOMOHIRO
分类号 H01L23/544 主分类号 H01L23/544
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