| 摘要 |
PROBLEM TO BE SOLVED: To provide a small surface processing system for substrate in which installation space is reduced and utilization of work space is enhanced. SOLUTION: A substrate cleaning section 20 in which a substrate requiring surface processing is pulled out from a cassette and held by means of a chuck 21, processing liquid is supplied to its surface through a liquid supply opening communicating with a dispenser 24 and dried before the substrate is restocked in the cassette, and a processing liquid processing section 30 arranged to control supply and collection of processing liquid stored in a liquid storage tank 31 communicating with the dispenser are located at upper and lower parts in the same section. COPYRIGHT: (C)2006,JPO&NCIPI
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