TEST SYSTEM AND PROBER ASSEMBLY FOR TESTING A LARGE AREA SUBSTRATE

摘要

PURPOSE: A test system for testing a large-sized substrate and a prober assembly are provided to minimize the venting and pump stop time by providing two or more probers in a test chamber. CONSTITUTION: A prober(205B) includes a frame(303) and six contact head assemblies(318). The prober has a plurality of motors(505) combined with the contact head assemblies. The frame includes a plurality of stepped portions(508A-508B) for performing the switching of alignment of contact heads of the contact head assemblies. The frame has the first length(L1) for forming the moving range of the contact head assemblies along the frame.