摘要 |
This invention provides a production process which can produce a titanium oxide electroconductor having excellent conductive properties and good transparency with high productivity. The production process comprises a laminate forming step of forming a precursor laminate comprising a first precursor layer and a second precursor layer provided in any desired order on a base, and an annealing step of heating the precursor laminate under a reducing atmosphere for annealing to form a metal oxide layer from the first precursor layer and the second precursor layer. The first precursor layer is a titanium oxide layer which is formed of an Nb-containing titanium oxide and, when subjected to a single layer anneal test, contains a polycrystal which is free from a rutile crystal. The second precursor layer is an amorphous titanium oxide layer formed of an Nb-containing titanium oxide and, when subjected to a single layer anneal test, contains a polycrystal which contains a rutile crystal.
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