发明名称 Tape adhering apparatus and tape adhering method
摘要 A device and a method for bonding a tape, by which a tape member may be preferably bonded to a work piece, and simplified processing, reduced cost, and improved bonding strength may be realized. A tape bonding device which bonds a tape member to a work piece includes an elastic sheet member on the upper surface of which the work piece is mounted, a vacuum chamber which is located on the side of the upper surface of the elastic sheet member, an air introducing section which is located on the side of the lower surface of the elastic sheet member, a mounting section on which the elastic sheet member is mounted, a holding member which holds the elastic sheet member in a state in which the air is prevented from being carried into the vacuum chamber, a tape holding unit which holds the tape member in the upper portion of the work piece, a first sucking unit for vacuum suction of the inside of the vacuum chamber, a second sucking unit for vacuum suction of the air introducing section, an air introducing unit which introduces the air into the air introducing section, and a pressurizing unit which introduces the air into the inside of the vacuum chamber in a pressurized state.
申请公布号 US7621307(B2) 申请公布日期 2009.11.24
申请号 US20050569471 申请日期 2005.04.12
申请人 TSUBAKI SEIKO INC. 发明人 SAITO KIMIKAZU;SUZUKI TETSUSHI
分类号 C09J5/00;B29C65/00;B32B38/10;H01L21/00;H01L21/304;H01L21/306;H01L21/68;H01L21/683 主分类号 C09J5/00
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