| 摘要 |
PROBLEM TO BE SOLVED: To exhibit the throughput of processing equipment more fully. SOLUTION: A container F containing a substrate is carried into manufacturing equipment (processing equipment) (S1). The processing equipment takes out the substrate from the container carried in, and processes the substrate before being contained in the container. The empty container F from which the substrate is taken out in the manufacturing equipment is carried out temporarily to a small stocker (S2). A next container F is carried into the manufacturing equipment while the substrate is processed (S3, NO→S6, NO→S1). At the same time, when processing of the substrate finishes in the manufacturing equipment (S3, YES), the empty container F which is stocked temporarily in the small stocker is carried into the manufacturing equipment (S4). The container F containing the processed substrate in the manufacturing equipment is carried out therefrom to the small stocker (S5). COPYRIGHT: (C)2010,JPO&INPIT
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