| 摘要 |
PROBLEM TO BE SOLVED: To provide a controller for an automatic machine capable of executing proper restoration processing when abnormality is generated in a system. SOLUTION: This controller 50 which controls collectively a plurality of units of control objective equipment, by allocating operation programs of the plurality of units of control objective equipment to a plurality of tasks in a control task group 60, in a polishing device provided with the plurality of units of control objective equipment, includes a CPU and a multitask OS 52 of a hardware 51 for executing the plurality of tasks by multitask processing, a monitoring task 70 for detecting a required time from the time when the task starts prescribed processing sequentially according to a processing number, up to the finish time thereof, in every task, as to the plurality of tasks executed in the multitask processing, and for determining that the task is abnormal when a detected processing time exceeds a threshold value preset in each task, and a device state monitoring part 90 for monitoring the plurality of units of control objective equipment, and the plurality of tasks store respectively information of the prescribed restoration processing for restoration from an abnormal state, in the respective tasks. COPYRIGHT: (C)2010,JPO&INPIT |
