| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a handling jig in which the generation of contamination from an abutting member is reduced at the time of supporting a body to be handled, and a shock absorbing member fixed to the abutting member can be replaced easily. <P>SOLUTION: The handling jig 1 comprises a fixed arm 4 and a rotary arm 5 for holding a photomask substrate 10, and a pawl 6 fixed to the fixed arm 4 and the rotary arm 5 as a member abutting against the photomask substrate 10 wherein the pawl 6 has a groove engaging with the photomask substrate 10, a linear protrusion for guiding the photomask substrate 10 to the engaging groove, and an O-ring abutting against the photomask substrate 10. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
