发明名称
摘要 A bulk chemical delivery system, comprising: a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. In non-limiting representative example, the bulk chemical canister may have a capacity of 200 liters. Also disclosed are novel manifolds for use in delivering chemicals from canisters and a transportation/containment cart.
申请公布号 JP4364425(B2) 申请公布日期 2009.11.18
申请号 JP20000501830 申请日期 1998.07.10
申请人 发明人
分类号 B01J4/00;B67D7/02;B67D7/84;C23C16/44;C23C16/448;C23C16/455;F17C7/00;F17C7/02;F17C9/00;F17C13/02;F17C13/04;H01L21/31 主分类号 B01J4/00
代理机构 代理人
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