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发明名称
摘要
申请公布号
JP4366116(B2)
申请公布日期
2009.11.18
申请号
JP20030141924
申请日期
2003.05.20
申请人
发明人
分类号
H01L29/786;H01L51/05;H01L51/00;H01L51/30
主分类号
H01L29/786
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