| 摘要 |
PROBLEM TO BE SOLVED: To provide an application apparatus capable of improving the efficiency of maintenance and preventing adhesion of dust, dirt or the like to a surface of a substrate carrying unit. SOLUTION: In the application apparatus including an application unit for applying a liquid to a substrate while carrying the substrate by the substrate carrying unit, the application unit has a nozzle for discharging the liquid and includes a moving mechanism capable of moving the application unit up to an area in which an operator can access the nozzle in a carrying direction of the substrate or in the reverse direction to the carrying direction of the substrate. COPYRIGHT: (C)2010,JPO&INPIT |
