INDUSTRIAL ROBOT

摘要

An industrial robot may include a first hand and a second hand, each of which is provided with a first hand portion including a substrate-mounting portion and a second hand portion having multiple substrate-mounting portions; a first arm rotatably joined to the first and second hand portion; a second arm rotatably joined to the first and second hand portion; an arm support portion; a column portion for holding said arm support portion; a first hand portion-rotating mechanism; a second hand portion-rotating mechanism; third hand portion-rotating mechanism; a fourth hand portion-rotating mechanism; a first arm-rotating mechanism structured to rotate said first arm with respect to said arm support portion; and a second arm-rotating mechanism structured to rotate said second arm with respect to said arm support portion.

主权项

1. An industrial robot comprising:
a first hand and a second hand, each of which is provided with a first hand portion comprising: one substrate-mounting portion to mount a sheet of substrate and a second hand portion having multiple substrate-mounting portions arranged to overlap with each other in the up-down direction at a predetermined pitch; a first arm which said first hand portion and said second hand portion of said first hand are rotatably joined to a front end thereof; a second arm which said first hand portion and said second hand portion of said second hand are rotatably joined to a front end thereof; an arm support portion to which a base end of said first arm and a base end of said second arm are rotatably joined; a column portion for holding said arm support portion movable in an up-down direction; a first hand portion-rotating mechanism for rotating said first hand portion of said first hand with respect to said first arm; a second hand portion-rotating mechanism structured to rotate said second hand portion of said first hand with respect to said first arm; a third hand portion-rotating mechanism structured to rotate said first hand portion of said second hand with respect to said second arm; a fourth hand portion-rotating mechanism structured to rotate said second hand portion of said second hand with respect to said second arm; a first arm-rotating mechanism structured to rotate said first arm with respect to said arm support portion; and a second arm-rotating mechanism structured to rotate said second arm with respect to said arm support portion; wherein said first hand portion and said second hand portion of said first hand are arranged such that they overlap with each other in the up-down direction and a center of rotation of said first hand portion of said first hand aligns with a center of rotation of said second hand portion of said first hand; said first hand portion and said second hand portion of said second hand are arranged such that they overlap with each other in the up-down direction and a center of rotation of said first hand portion of said second hand aligns with a center of rotation of said second hand portion of said second hand; said first arm is attached to a top surface of said arm support portion; said second arm is attached to a bottom surface of said arm support portion; and said first arm and said second arm are arranged such that a center of rotation of said first arm aligns with the center of rotation of said second arm.