| 摘要 |
<p>PURPOSE: A wafer transfer unit installed in a transfer chamber of a multi cluster module is provided to improve yield by preventing a transfer jam in the transfer chamber. CONSTITUTION: A load-lock chamber(31,32) and a process chamber(21,22) are installed around a transfer chamber(10). A transfer robot(150) inputs a wafer(40) to the load-lock chamber or outputs the wafer. An input and output robot(251,252,253) outputs the wafer in the process chamber and transfers the wafer to the transfer robot. A multi joint arm has a plurality of joints to rotate the transfer robot horizontally. A single joint arm has one joint to rotate the input and output robot horizontally. A plurality of end effectors are attached to at least one of the multi joint arm.</p> |
