发明名称 |
Probe for measuring characteristics of an excitation current of a plasma, and associated plasma reactor |
摘要 |
A probe for measuring electrical characteristics of an excitation current of a plasma is provided. The probe is mounted on a conductive line that includes an inner conductor and an outer conductor. The probe includes a current sensor and a voltage sensor. The current sensor includes a groove formed in the ground of one of the conductors in order to form a detour for the current flowing through the conductor, and a point for measuring electric voltage between a ground connected to the conductor and a point of the groove. The current sensor thus is able to measure a voltage proportional to the first time derivative of intensity (Iplasma) of the excitation current. The voltage sensor is a shunt sensor capable of measuring a voltage proportional to the first time derivative of the voltage (Vplasma) of the excitation current. A plasma reactor including a probe of the aforementioned type is also provided.
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申请公布号 |
US7615985(B2) |
申请公布日期 |
2009.11.10 |
申请号 |
US20050663129 |
申请日期 |
2005.09.15 |
申请人 |
ECOLE POLYTECHNIQUE;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) |
发明人 |
DINE SEBASTIEN;JOLLY JACQUES;LAROUR JEAN BERNARD PIERRE |
分类号 |
G01R31/02;G01R1/06;G01R19/00;H05H1/00 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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