发明名称 Methods of fabricating nanoscale-to-microscale structures
摘要 Methods for the production of shaped nanoscale-to-microscale structures, wherein a nanoscale-to-microscale template is provided having an original chemical composition and an original shape, and the nanoscale-to-microscale template subjected to a chemical reaction, so as to partially or completely convert the nanoscale-to-microscale template into the shaped nanoscale-to-microscale structure having a chemical composition different than the original chemical composition and having substantially the same shape as the original shape, being a scaled version of the original shape. The shaped nanoscale-to-microscale structure formed comprises an element (such as silicon), a metallic alloy (such as a silicon alloy), or a non-oxide compound (such as silicon carbide or silicon nitride).
申请公布号 US7615206(B2) 申请公布日期 2009.11.10
申请号 US20070838211 申请日期 2007.08.13
申请人 GEORGIA TECH RESEARCH CORPORATION 发明人 SANDHAGE KENNETH HENRY;BAO ZHIHAO
分类号 C01B13/14 主分类号 C01B13/14
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