NANO STAGE HAVING DRIVING PART AT CENTER

摘要

PURPOSE: A nano stage with a driver in the center is provided to perform precise transfer without a moment by making the center of gravity coincide with the point of application. CONSTITUTION: An object to be processed or measured is fixed in a workbench(110). A base(120) supports the workbench movably. A driver(130) passes through the center of gravity and transfers the worktable. A ball screw(132) is positioned in the center of the workbench to pass through the center of gravity. A driving motor rotates the ball screw. A displacement detector(140) measures an amount of the transfer of the workbench.