| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micromirror device, restraining a fluctuation in gap amount in driving. Ž<P>SOLUTION: This micromirror device 100 includes a micromirror chip 110, an electrode substrate 130, an intermediate spacer 150 and a plurality of bonding members 170. The intermediate spacer 150 is disposed in contact with the chip 110 and the substrate 130, thereby keeping the space between the micromirror chip 110 and the electrode substrate 130 constant. The intermediate spacer 150 has a plurality of through-holes 154, and the bonding members 170 are disposed in the through-holes 154, respectively, and the micromirror chip 110 and the electrode substrate 130 are electrically connected and mechanically bonded to each other. The intermediate spacer 150 has a plurality of suction holes 156 penetrating therethrough, and the electrode spacer 130 has a plurality of suction holes 134, 136 penetrating therethrough. The suction hole 136 and the suction hole 156 are spatially connected to each other. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
