| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a process by which the production of silicon obtained by the hydrogen reduction reaction of chlorosilane is carried out safely and continuously. <P>SOLUTION: The process for production of silicon comprises steps of: [1] reacting a chlorosilane with hydrogen under heating in a reaction vessel to cause the precipitation of silicon, while discharging an exhaust gas containing a silane oligomer and a silicon micropowder; [2] transporting the exhaust gas discharged in the step [1] while keeping the temperature of the exhaust gas at 105°C or higher; [3] supplying the exhaust gas transported in the step [2] to a filter at a temperature of 105°C or higher and discharging the exhaust gas from the filter unit at a temperature of 105°C or higher to remove the silicon micropowder from the exhaust gas, thereby producing a mixed gas containing hydrogen and the silane oligomer; [4] cooling the mixed gas produced in the step [3] to separate hydrogen in the form of a gas from the mixed gas; and others. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
