| 摘要 |
Disclosed is a holder stage for aligning glass substrates and/or holders such that the glass substrates are arranged and aligned safely on the holders and loaded to a substrate boat in a substrate processing system. The holder stage (100) according to the present invention is a holder stage loaded with and accommodates holders (140) and glass substrates (10) corresponding to the respective holders (140), wherein the holder stage (100) includes: an alignment unit (200) for aligning the holders (140) and the glass substrates (10) at the same time; and an alignment unit rotating unit (150) for rotating the alignment unit |
