| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for manufacturing a flexible semiconductor device by using a flexible substrate, such as, a resin substrate. SOLUTION: The method for manufacturing a flexible display device, by using a resin substrate comprises the steps of forming the resin substrate on a fixed substrate, having a separation layer; forming at least a TFT element on the resin substrate; and peeling the resin substrate from the fixed substrate within the separation layer at an interface thereof, by irradiating the separation layer with a laser beam. COPYRIGHT: (C)2010,JPO&INPIT
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