SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE: A semiconductor manufacturing apparatus is provided to form the heater supporter of PBN material and to reduce generation of crack without changing environment of the chamber. CONSTITUTION: The chamber(110) is formed within the reaction chamber(112). The wafer carrier(116) unloads or loads a wafer. The heater of the sheet form heats the lower part of the wafer carrier. The supporters(162) of the sheet form support the heater lower part of the sheet form. The supporter bodies(164) support a supporter. The supporter includes the bottom projection combined with the supporter body in the lower part.