Semiconductor device test apparatus and method

摘要

There is provided a semiconductor test apparatus which uses a test processor to apply a test signal to a DUT having a semiconductor device within it to determine whether the memory is acceptable or not on the basis of a response signal, and uses a repair analysis computing unit to analyze the result of the test to determine how to replace a defective cell of the memory with a spare line. The repair analysis computing unit includes a fail memory which stores test results and a general-purpose repair analysis part which analyzes the test results in accordance with an MRA program and inserts and executes a user function of a user analysis program between units of analysis processing.