| 摘要 |
PROBLEM TO BE SOLVED: To provide a reaction tube which does not have the risk of implosion, even if it is decompressed, while the top face thereof is flat, and a thermal processing apparatus capable of performing a thermal processing with high uniformity by using this reaction tube. SOLUTION: Since an annular trench part 34 is formed in the peripheral region of the top face in a planar portion 31 of a blocking part 30, stress acting on the inside, from an outside intersecting with a shaft direction of the reaction tube to the planar portion 31, is distributed, when an inside of the reaction tube is decompressed. Since the wall thickness of a bottom face corner part at a periphery side in the annular trench part 34 is made larger than the wall thicknesses of other portions in the annular trench part 34, stress given to a corner part on the peripheral side of the annular trench part 34 is distributed. As a result, even if the planar portion 31 of the blocking part 30 of the reaction tube is flattened, implosion can be prevented, when the inside of the reaction tube is decompressed. By using this reaction tube, it is effective in enabling performing thermal processing with the high uniformity, especially, with respect to wafers at an upper portion side, and moreover, for controlling the height of the apparatus. COPYRIGHT: (C)2010,JPO&INPIT |
