ZINC OXIDE SINTERED COMPACT, ITS PRODUCING METHOD, SPUTTERING TARGET AND ELECTRODE

摘要

PROBLEM TO BE SOLVED: To provide an electrode having low resistivity and high weather resistance, by using a zinc oxide sintered compact for a sputtering target.

SOLUTION: The change of the resistivity when the electrode is exposed under a humidity of 90% RH at 60°C is measured as the weather resistance of the electrode. Measured results in such three cases as (a) 200 nm film thickness, (b) 100 nm film thickness and (c) 100 nm film thickness without CeO2addition when a sputtering target similar to the sputtering target is used are shown in Fig.6. The initial value of the resistivity is around 6 to 7×10-4Ωcm, which is sufficiently small, and is increased gradually to 20 Ωcm or more after a lapse of 200 hours in (c) which is a case without CeO2addition. However, the increasing of the resistivity in (a) and (b) which are cases with CeO2addition is suppressed very much. Especially, a small resistivity of 10-3Ωcm or less is kept after a lapse of 1,000 hours in the case of 200 nm film thickness.

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