发明名称 |
STRUCTURE FOR PROTECTING JUNCTION BETWEEN DIAMOND SURFACE AND METAL PIECE |
摘要 |
PROBLEM TO BE SOLVED: To improve the limit in utilization in an ultimate environment caused by brittleness of the strength of an interface between a diamond surface and a metal piece and of the metal piece itself in a high temperature or in chemicals. SOLUTION: The structure for protecting junction between the diamond surface and the metal piece protects the junction between the diamond surface and the metal piece by providing an Ru coating for covering the entire metal piece and having an area larger than the area of the metal piece, on a non-junction surface between the metal piece and the diamond surface. COPYRIGHT: (C)2010,JPO&INPIT |
申请公布号 |
JP2009252775(A) |
申请公布日期 |
2009.10.29 |
申请号 |
JP20080094925 |
申请日期 |
2008.04.01 |
申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY |
发明人 |
IKEDA KAZUHIRO;UMEZAWA HITOSHI;SHIKADA SHINICHI |
分类号 |
H01L21/28 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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