发明名称 STRUCTURE FOR PROTECTING JUNCTION BETWEEN DIAMOND SURFACE AND METAL PIECE
摘要 PROBLEM TO BE SOLVED: To improve the limit in utilization in an ultimate environment caused by brittleness of the strength of an interface between a diamond surface and a metal piece and of the metal piece itself in a high temperature or in chemicals. SOLUTION: The structure for protecting junction between the diamond surface and the metal piece protects the junction between the diamond surface and the metal piece by providing an Ru coating for covering the entire metal piece and having an area larger than the area of the metal piece, on a non-junction surface between the metal piece and the diamond surface. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009252775(A) 申请公布日期 2009.10.29
申请号 JP20080094925 申请日期 2008.04.01
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY 发明人 IKEDA KAZUHIRO;UMEZAWA HITOSHI;SHIKADA SHINICHI
分类号 H01L21/28 主分类号 H01L21/28
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