摘要 |
<P>PROBLEM TO BE SOLVED: To solve the following problem: conventional measurement modules using pipes formed of ceramics are expensive. Ž<P>SOLUTION: The measurement module 32 comprises a pipe 322 formed of a ceramic; electrodes 324a, 324b provided at an outer circumference of the pipe 322; a shield case 325 disposed outside of the pipe 322; a coil 327, a yoke 326; semicircle ring members 323aa, 323ab constructing a pipe holder 323a of a ring surrounding the outer circumference of the pipe 322 and provided with a site to attach the shield case 325 and the yoke 326; and semicircle ring members 323ba, 323bb constructing a pipe holder 323b of a ring surrounding the outer circumference of the pipe 322 and provided with a site to attach the shield case 325 and the yoke 326. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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