| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic actuator which is excellent in process adaptability and has a highly accurate step-like level difference, and to provide a method for manufacturing it or the like. Ž<P>SOLUTION: In the electrostatic actuator equipped with an individual electrode 5 formed on a glass substrate, a vibrating plate 6 opposed and arranged in parallel to this individual electrode 5 through a predetermined gap, and a driving means 40 for generating an electrostatic force between the individual electrode 5 and the vibrating plate 6 to generate a displacement in the vibrating plate 6, an insulating membrane 7 having at least one step of step-like level difference on an opposing face to the vibrating plate 6 of the individual electrode 5, is provided. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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