PRESSURE SENSOR

摘要

A diaphragm section (2) has a mesh-like beam section (2a) which partitions the diaphragm section (2) into a plurality of rectangular regions, and a thin film section (2b) formed in the region partitioned by the beam section (2a), and the thickness of the thin film section (2b) is less than that of the beam section (2a). Compared with the case where the thickness of the diaphragm section (2) is uniformly the same as the thickness of the beam section (2a), a displacement quantity of the diaphragm section (2) per unit pressure is increased. Compared with the case where the thickness of the diaphragm section (2) is uniformly the same as the thickness of the thin film section (2b), withstand voltage is increased, since the entire area of the thin film section (2b) is smaller than the area of the whole diaphragm section (2). Thus, a high-sensitivity and small pressure sensor which is not easily broken even when an excessive pressure is applied is provided.