| 摘要 |
<p>Disclosed is an analytical method that can analyze a functional organic compound with a high accuracy. Cluster ions are accelerated and introduced into a sample (18) so that the kinetic energy of cluster ions is less than 3.1 eV per atom constituting the cluster ion. The functional organic compound in the sample (18) is etched without breaking of the chemical structure. Accordingly, the functional organic compound, which is not chemically modified, is exposed on the surface of the sample (18). When etching and the surface analysis of the sample (18) are alternately carried out or when the surface analysis of the sample (18) is carried out while performing etching, the sample (18) can be accurately analyzed in the direction of depth.</p> |
