| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a nanostructure using a polyvalent ion, by which a nanostructure having a dimension of 0.5 to 10 nm can be produced, and to provide an apparatus for producing the nanostructure. Ž<P>SOLUTION: A nanostructure having a surface reaction product 5 in a dimension of a nanometer order is produced through: a first step in which molecules or atoms 2 different from the molecules or atoms of the workpiece 3 are adsorbed onto a surface of a workpiece 3; a second step in which the surface of the workpiece 3 is irradiated with polyvalent ions 1 having a valence of 10 or higher to sputter different molecules or different atoms 2 to thereby form an active nanoregion A; and a third step in which a reactive substance 4 which causes a surface chemical reaction in the active nanoregion 3A is introduced into the active nanoregion 3A to form a surface reaction product 5 in the active nanoregion 3A. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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