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发明名称
Tantal- und Niob-Verbindungen und ihre Verwendung für die Chemical Vapour Deposition (CVD)
摘要
申请公布号
DE502007001528(D1)
申请公布日期
2009.10.29
申请号
DE200750001528T
申请日期
2007.07.26
申请人
H.C. STARCK GMBH
发明人
REUTER, KNUD;KIRCHMEYER, STEFAN;GAESS, DANIEL;POKOJ, MICHAEL;SUNDERMEYER, JOERG;STOLZ, WOLFGANG;OCHS, THOMAS;VOLZ, KERSTIN
分类号
C07F9/00;H01L21/285
主分类号
C07F9/00
代理机构
代理人
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地址
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