| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure unevenness of a measurement surface using surface position measuring sensors and to correct a measured value error of an encoder due to the unevenness of the measurement surface by using a measurement result thereof. <P>SOLUTION: A stage WST is moved while the position is monitored using an X interferometer 127 and a Y interferometer 16, and Z positions of Y scales 39Y<SB>1</SB>and 39Y<SB>2</SB>provided on an upper surface of the stage WST are measured by using surface position measuring sensors 72a to 72d. Here, a Y-axial tilt of the Y scale 39Y<SB>2</SB>is obtained from the difference between measurement results of, for example, the surface position sensors 72a and 72b. Tilts of all surfaces of the Y scales 39Y<SB>1</SB>and 39Y<SB>2</SB>are measured to generate two-dimensional unevenness data thereof. Measurement errors of the surface position measuring sensors are corrected using the unevenness data, and measurement errors of Y encoder heads 65 and 64 scanning the Y scales 39Y<SB>1</SB>and 39Y<SB>2</SB>are also corrected. <P>COPYRIGHT: (C)2010,JPO&INPIT |
