| 摘要 |
A recess channel transistor includes a semiconductor substrate; a trench isolation region in the semiconductor substrate, which defines an active area; a gate trench in the active area, wherein the gate trench includes a round lower portion; a recessed gate embedded in the gate trench with a spherical gate portion situated in the round lower portion; a gate oxide layer in the round lower portion between the semiconductor substrate and the spherical gate portion; a source region in the active area at one side of the recessed gate; a drain region in the active area at the other side of the recessed gate; and a channel region between the source region and the drain region, wherein the channel region presents a convex curve profile when viewed from a channel widthwise direction.
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