| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate for multiple exposure which supplies an exposure substrate to a proximity exposure device exposing the exposure substrate using a plurality of exposure masks smaller in area than that of an exposure region of the exposure substrate , the exposure mask facing the exposure substrate. <P>SOLUTION: This substrate for multiple exposure supplies an exposure substrate to the proximity exposure device exposing the exposure substrate using the plurality of exposure masks smaller in area than that of the exposure region of the exposure substrate, the exposure mask facing the exposure substrate. The substrate for multiple exposure has a plurality of active regions and a plurality of inactive regions, where the dimension of each inactive region is integer multiple of the pixel pitch of the active region. <P>COPYRIGHT: (C)2010,JPO&INPIT |
