| 摘要 |
The invention relates to a piezoelectric thin film vibrator having a piezoelectric device formed by using thin film formation technology, a fabrication method thereof, a driving apparatus and a piezoelectric motor using the same, and an object is to provide a piezoelectric thin film vibrator which can provide an excellent piezoelectric characteristic at low cost, a fabrication method thereof, a driving apparatus and a piezoelectric motor using the same. A piezoelectric thin film vibrator is configured to have a resonator which generates a flexure traveling wave, a lower electrode which is formed on the resonator, a piezoelectric thin film which is formed by epitaxial growth on the lower electrode, and a plurality of upper electrode parts which is formed on the piezoelectric thin film.
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